Temporary campus guidelines for any gathering other than academic classes, professional education programs (GTPE), or department meetings are available at specialevents.gatech.edu/fall-2020-events.

March 16, 2020 - March 19, 2020
8:30am - 5:00pm
Marcus Nanotechnology Building | 345 Ferst Drive | Atlanta GA | 303332
Free food
Recurring Event
For more information:

Contact: Dr.Hang Chen Ph.D.
Institute for Electronics and Nanotechnology

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CANCELLED DUE TO COVID19 CONCERNS: Spring 2020 IEN Micro-Fabrication Short Course


The Institute for Electronics and Nanotechnology (IEN) at Georgia Tech will offer a short course on micro-fabrication from March 16th - 18th, 2020. This in tensive 3 day short course combines classroom lectures and laboratory based hands-on fabrication in the IEN cleanroom. The goal of the course is to impart a basic understanding of the science and technology of micro-fabrication processes as used in academia and industry.

This short course will cover essential micro-fabrication techniques including, photolithography, thin film deposition, etching, packaging, and characterization. Attendees will gain valuable experience by fabricating simple devices in one of the most advanced uni versity cleanrooms in North America.

Attendance is open to the general technical community and is not limited to current Georgia Tech students or IEN users. Anyone interested in cleanroom fabrication techniques is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in micro-fabrication techniques and applications.

A course emphasis will be placed on IEN cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.

Rates: *Rates include lunches on all days*

  • Georgia Tech Rate: $200
  • Academic and Government Rate: $400
  • Industry Rate: $800

Due to the nature of the lab portion of the course, registration has a maximum of 15 participants. Registration and full payment MUST be completed online by March the 11th at 4PM EST, 2020: NO EXCEPTIONS. No one will be allowed to register or pay on-site.

Read the Course Agenda and Register Here


Ongoing Dates

This event will take place from March 16, 2020 to March 19, 2020.

  • March 16, 2020: 8:30am - 5:00pm
  • March 17, 2020: 8:30am - 5:00pm
  • March 18, 2020: 8:30am - 5:00pm
  • March 19, 2020: 8:30am - 5:00pm