March 18, 2019 - March 21, 2019
8:00am - 4:30pm
Marcus Nanotechnology Building | 345 Ferst Drive | Atlanta GA | 30332
Free food
Fee Varies
Recurring Event
For more information:

Dr. Hang Chen
Institute for Electronics and Nanotechnology
345 Ferst Drive
Atlanta, GA 30332

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Spring 2019 IEN Micro-Fabrication Short Course: Monday, March 18, 2019 - Wednesday, March 20, 2019

The Institute for Electronics and Nanotechnology (IEN) at Georgia Tech will offer a short course on micro-fabrication from March 18th - 20th, 2019. This in­tensive 3 day short course combines classroom lectures and laboratory based hands-on fabrication in the IEN cleanroom. The goal of the course is to impart a basic understanding of the science and technology of micro-fabrication processes as used in academia and industry.

This short course will cover essential micro-fabrication techniques including, photolithography, thin film deposition, etching, packaging, and characterization. Attendees will gain valuable experience by fabricating simple devices in one of the most advanced uni­versity cleanrooms in North America.

Target Audience

Attendance is open to the general technical community and is not limited to current Georgia Tech students or IEN users. Anyone interested in cleanroom fabrication techniques is strongly encouraged to attend this course. The course is suitable for both new and experienced researchers interested in micro-fabrication techniques and applications.

A course emphasis will be placed on IEN cleanroom resources, however, the concepts and techniques discussed are applicable to a broad array of research in this field.

Rates: *Rates include lunches on all days*

Georgia Tech Rate: $200
Academic and Government Rate: $400
Industry Rate: $800


Ongoing Dates

This event will take place from March 18, 2019 to March 21, 2019.

  • March 18, 2019: 8:00am - 4:30pm
  • March 19, 2019: 8:00am - 4:30pm
  • March 20, 2019: 8:00am - 4:30pm
  • March 21, 2019: 8:00am - 4:30pm

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