Wednesday, June 6 2018
9:00am - 12:00pm
Marcus Nanotechnology Inorganic Cleanroom | Marcus Nanotechnology Building Level 1 | 345 Ferst Drive | Atlanta GA | 30332
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Institute for Electronics and Nanotechnology Cleanroom Open House

IEN provides cross-discipline support for nanoscale lithography, fabrication, synthesis, characterization, modeling, design, computation, and hands-on training via our shared user cleanroom environments. This event is designed to give current and potential users the opportunityto tour the cleanrooms, observe tool demonstrations, and hold processing and fabrication methods consultations with our expert staff, free of charge. Additionally, IEN staff will offer technical consultation to attendees who register in advance.

• 9:00 – 9:30      Registration and gowning
• 9:30 – 10:00    Inorganic cleanroom tour
• 10:00 – 10:45  Maskless photolithography process demo (Inorganic cleanroom)
• 10:45 – 11:30   Inorganic cleanroom metrology techniques demo (SEM, profilometry, Ellipsometry)
• 11:30 – 12:00   Inorganic cleanroom tour (make-up)

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